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压电基片上周期性金属光栅中表面声波的特征参数

Characteristic parameters of surface acoustic waves in a periodic metal grating on a piezoelectric substrate.

作者信息

Zhang Y, Desbois J, Boyer L

机构信息

Lab. de Phys. and Metrol. des Oscillateurs, CNRS, Besancon.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 1993;40(3):183-92. doi: 10.1109/58.216832.

DOI:10.1109/58.216832
PMID:18263173
Abstract

The coupling problem between electrodes due to the propagation of acoustic waves in a periodic metal grating on a piezoelectric substrate is theoretically studied. A method for the determination of the mutual admittance between the grating electrodes is presented, and an analytical expression for the contribution of surface acoustic waves (SAWs) is proposed. The SAW characteristic parameters are determined with a numerical technique that is able to deal with a leaky SAW as well as a true SAW (conventional Rayleigh type or Bleustein-Gulyaev type). Using this technique, the SAWs' contribution to the mutual admittance can be removed, and the analysis of other contributions becomes possible. In particular, the amplitude decay rate of the residual mutual admittance with electrode separation gives information about the propagation of the surface skimming bulk waves (SSBWs). The method presented is applied to several currently used material-cut configurations.

摘要

从理论上研究了由于声波在压电基片上的周期性金属光栅中传播而导致的电极间耦合问题。提出了一种确定光栅电极间互导纳的方法,并给出了表面声波(SAW)贡献的解析表达式。利用一种能够处理泄漏SAW以及真正SAW(传统瑞利型或布卢斯泰因 - 古利亚耶夫型)的数值技术来确定SAW特性参数。使用该技术,可以消除SAW对互导纳的贡献,从而有可能分析其他贡献。特别是,残余互导纳随电极间距的幅度衰减率给出了关于表面掠射体波(SSBW)传播的信息。所提出的方法应用于几种目前使用的材料切割配置。

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