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用于高温微电子应用和图案化石墨烯生长的镍纳米颗粒墨水的配方与气溶胶喷射印刷

Formulation and Aerosol Jet Printing of Nickel Nanoparticle Ink for High-Temperature Microelectronic Applications and Patterned Graphene Growth.

作者信息

McKibben Nicholas, Curtis Michael, Maryon Olivia, Sawyer Mone't, Lazouskaya Maryna, Eixenberger Josh, Deng Zhangxian, Estrada David

机构信息

Micron School of Materials Science and Engineering, Boise State University, 1910 W University Drive, Boise, Idaho 83725, United States.

Tallinn University of Technology. Ehitajate tee 5, Tallinn 19086, Estonia.

出版信息

ACS Appl Electron Mater. 2024 Jan 25;6(2):748-760. doi: 10.1021/acsaelm.3c01175. eCollection 2024 Feb 27.

Abstract

Aerosol jet printing (AJP) is an advanced manufacturing technique for directly writing nanoparticle inks onto target substrates. It is an emerging reliable, efficient, and environmentally friendly fabrication route for thin film electronics and advanced semiconductor packaging. This fabrication technique is highly regarded for its rapid prototyping, the flexibility of design, and fine feature resolution. Nickel is an attractive high-temperature packaging material due to its electrical conductivity, magnetism, and corrosion resistance. In this work, we synthesized nickel nanoparticles and formulated an AJP ink, which was printed on various material surfaces. Thermal sintering experiments were performed on the samples to explore the redox behavior and to optimize the electrical performance of the devices. The nickel devices were heated to failure under an argon atmosphere, which was marked by a loss of reflectance and electrical properties due to the dewetting of the films. Additionally, a reduction mechanism was observed from these studies, which resembled that of nucleation and coalescence. Finally, multilayer graphene was grown on a custom-printed nickel thin film using chemical vapor deposition (CVD), establishing a fully additive manufacturing route to patterned graphene.

摘要

气溶胶喷射打印(AJP)是一种将纳米颗粒墨水直接写入目标基板的先进制造技术。它是一种新兴的、可靠、高效且环保的薄膜电子产品和先进半导体封装制造路线。这种制造技术因其快速成型、设计灵活性和精细特征分辨率而备受推崇。镍由于其导电性、磁性和耐腐蚀性,是一种有吸引力的高温封装材料。在这项工作中,我们合成了镍纳米颗粒并配制了一种AJP墨水,将其打印在各种材料表面。对样品进行了热烧结实验,以探索氧化还原行为并优化器件的电性能。在氩气气氛下将镍器件加热至失效,其特征是由于薄膜的去湿导致反射率和电性能丧失。此外,从这些研究中观察到一种类似于成核和聚结的还原机制。最后,使用化学气相沉积(CVD)在定制印刷的镍薄膜上生长多层石墨烯,建立了一种用于图案化石墨烯的全增材制造路线。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1be9/10902849/dc1e4c95e76e/el3c01175_0007.jpg

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