Abdollahi Amir, Jiang Zhongwei, Arabshahi Sayyed Alireza
Graduate School of Science and Engineering, Yamaguchi University, Yamaguchi, Japan.
IEEE Trans Ultrason Ferroelectr Freq Control. 2007 Dec;54(12):2446-55. doi: 10.1109/TUFFC.2007.558.
The mass sensitivity of the piezoelectric surface acoustic wave (SAW) sensors is an important factor in the selection of the best gravimetric sensors for different applications. To determine this value without facing the practical problems and the long theoretical calculation time, we have shown that the mass sensitivity of SAW sensors can be calculated by a simple three-dimensional (3-D) finite-element analysis (FEA) using a commercial finite-element platform. The FEA data are used to calculate the wave propagation speed, surface particle displacements, and wave energy distribution on different cuts of various piezoelectric materials. The results are used to provide a simple method for evaluation of their mass sensitivities. Meanwhile, to calculate more accurate results from FEA data, surface and bulk wave reflection problems are considered in the analyses. In this research, different cuts of lithium niobate, quartz, lithium tantalate, and langasite piezoelectric materials are applied to investigate their acoustic wave properties. Our analyses results for these materials have a good agreement with other researchers' results. Also, the mass sensitivity value for the novel cut of langasite was calculated through these analyses. It was found that its mass sensitivity is higher than that of the conventional Rayleigh mode quartz sensor.
压电表面声波（SAW）传感器的质量灵敏度是为不同应用选择最佳重量传感器时的一个重要因素。为了在不面临实际问题和漫长理论计算时间的情况下确定该值，我们表明SAW传感器的质量灵敏度可以通过使用商业有限元平台进行简单的三维（3-D）有限元分析（FEA）来计算。FEA数据用于计算各种压电材料不同切割面上的波传播速度、表面粒子位移和波能量分布。这些结果用于提供一种评估其质量灵敏度的简单方法。同时，为了从FEA数据中计算出更准确的结果，分析中考虑了表面波和体波反射问题。在本研究中，应用了铌酸锂、石英、钽酸锂和硅酸镓镧压电材料的不同切割面来研究它们的声波特性。我们对这些材料的分析结果与其他研究人员的结果有很好的一致性。此外，通过这些分析计算出了新型切割面硅酸镓镧的质量灵敏度值。结果发现，其质量灵敏度高于传统瑞利模式石英传感器。
