Lin Zhi-Xun, Wu Sean, Ro Ruyen, Lee Maw-Shung
Department of Electronic Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, Taiwan, ROC.
IEEE Trans Ultrason Ferroelectr Freq Control. 2009 Jun;56(6):1246-51. doi: 10.1109/TUFFC.2009.1166.
(100) AlN films have better surface acoustic wave (SAW) properties than (002) AlN films. In this research, (100) AlN films were combined with diamonds as a new composite SAW substrate. The SAW properties of (100) AlN films on diamonds were analyzed with 4 composite structures: interdigital transducer (IDT)/(100) AlN/diamond, (100) AlN/IDT/diamond, IDT/(100) AlN/metal/diamond, and metal/IDT/(100) AlN/diamond, and they exhibited some excellent SAW properties. Our research results provide a predictable and theoretical basis for further application on high-velocity SAW devices.
（100）取向的氮化铝（AlN）薄膜比（002）取向的AlN薄膜具有更好的表面声波（SAW）性能。在本研究中，（100）取向的AlN薄膜与金刚石相结合，形成一种新型的复合SAW衬底。对金刚石上（100）取向的AlN薄膜的SAW性能进行了4种复合结构的分析：叉指换能器（IDT）/（100）AlN/金刚石、（100）AlN/IDT/金刚石、IDT/（100）AlN/金属/金刚石和金属/IDT/（100）AlN/金刚石，它们展现出了一些优异的SAW性能。我们的研究结果为高速SAW器件的进一步应用提供了可预测的理论基础。
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