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体积负离子源中D(-)/H(-) 负离子产生与等离子体参数的关系

D(-)/H(-) negative ion production versus plasma parameters in a volume negative ion source.

作者信息

Mori Shigefumi, Fukumasa Osamu

机构信息

Graduate School of Science and Engineering, Yamaguchi University, Ube, Japan.

出版信息

Rev Sci Instrum. 2008 Feb;79(2 Pt 2):02A507. doi: 10.1063/1.2802594.

DOI:10.1063/1.2802594
PMID:18315128
Abstract

Pure volume production of D(-) negative ions is studied in rectangular negative ion source equipped with an external magnetic filter (MF). Plasma parameters (n(e) and T(e)) in D(2) plasmas are varied mainly in the downstream region by changing the magnetic field intensity of the MF (i.e., B(MF)). Production and control of D(2) plasma is nearly the same as that of H(2) plasmas, although the values of n(e) and T(e) in D(2) plasma are slightly higher than that of H(2) plasmas in both the source and the extraction regions. On D(-)/H(-) production, however, it appears some different points. By varying the B(MF), H(-) production in the extraction region is remarkably changed corresponding to the variation of n(e) and T(e) in the extraction region. On the other hand, D(-) production is not so varied under the same discharge conditions in H(2) plasmas. This difference in D(-) production is not well explained only variation of n(e) and T(e) in D(2) plasmas. Optimum B(MF) and gas pressure for D(-) production is slightly higher than that for H(-) production.

摘要

在配备外部磁过滤器(MF)的矩形负离子源中研究了D(-)负离子的纯批量生产。通过改变MF的磁场强度(即B(MF)),D2等离子体中的等离子体参数(n(e)和T(e))主要在下游区域发生变化。D2等离子体的产生和控制与H2等离子体几乎相同,尽管在源区和提取区中,D2等离子体中的n(e)和T(e)值略高于H2等离子体中的值。然而,在D(-)/H(-)产生方面,似乎存在一些不同点。通过改变B(MF),提取区域中的H(-)产生量会随着提取区域中n(e)和T(e)的变化而显著变化。另一方面,在H2等离子体的相同放电条件下,D(-)的产生量变化不大。D(-)产生量的这种差异不能仅通过D2等离子体中n(e)和T(e)的变化来很好地解释。产生D(-)的最佳B(MF)和气体压力略高于产生H(-)的最佳值。

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