Vizir A V, Shandrikov M V, Oks E M
Institute of High Current Electronics, Siberian Division of Russian Academy of Science, Tomsk, Russia.
Rev Sci Instrum. 2008 Feb;79(2 Pt 2):02B719. doi: 10.1063/1.2823891.
The results of an experimental study of low-energy (<200 eV) ion flux generation with space charge neutralization are presented. Argon was used as a working gas. The working gas pressure in the vacuum chamber was 2-4 x 10(-2) Pa. Ion beam was extracted from the hollow cathode of main discharge plasma by a single mesh extractor with subsequent deceleration of ions to a required energy in a layer between the mesh and the beam plasma. The ion beam current was measured on the collector located on the distance of 30-60 cm from the discharge system. The penetration of electron component from the main discharge plasma through the mesh into the region of the ion beam drift space was realized by potential barrier reduction, in conditions of the optimal extractor potential with respect to the hollow cathode. The space charge neutralization of low-energy ion beam resulted in drift space plasma potential reduction and ion beam current growth. At the main discharge current of 1 A and main discharge voltage of 300 V, the ion beam current of up to 100 mA with the ion energy of 50-150 eV was obtained.
介绍了通过空间电荷中和产生低能（<200 eV）离子通量的实验研究结果。使用氩气作为工作气体。真空室内的工作气体压力为2 - 4×10⁻² Pa。离子束通过单网提取器从主放电等离子体的空心阴极提取，随后在网和束等离子体之间的一层中将离子减速至所需能量。离子束电流在距离放电系统30 - 60 cm处的收集器上测量。通过降低势垒，在相对于空心阴极的最佳提取器电势条件下，实现了主放电等离子体中的电子成分通过网进入离子束漂移空间区域。低能离子束的空间电荷中和导致漂移空间等离子体电势降低和离子束电流增加。在主放电电流为1 A和主放电电压为300 V时，获得了离子能量为50 - 150 eV、离子束电流高达100 mA的结果。
