Wang Kaiwei, Martin Haydn, Jiang Xiangqian
Centre for Precision Technologies, University of Huddersfield, Huddersfield HD1 3DH, United Kingdom.
Rev Sci Instrum. 2008 Feb;79(2 Pt 1):023109. doi: 10.1063/1.2870085.
In this paper, we report the recent progress in optical-beam scanning fiber interferometry for potential online nanoscale surface measurement based on the previous research. It attempts to generate a robust and miniature measurement device for future development into a multiprobe array measurement system. In this research, both fiber-optic-interferometry and the wavelength-division-multiplexing techniques have been used, so that the optical probe and the optical interferometer are well spaced and fast surface scanning can be carried out, allowing flexibility for online measurement. In addition, this system provides a self-reference signal to stabilize the optical detection with high common-mode noise suppression by adopting an active phase tracking and stabilization technique. Low-frequency noise was significantly reduced compared with unstabilized result. The measurement of a sample surface shows an attained repeatability of 3.3 nm.
在本文中，我们基于先前的研究报告了用于潜在在线纳米级表面测量的光束扫描光纤干涉测量技术的最新进展。它试图制造一种坚固且微型的测量设备，以便未来发展成为多探头阵列测量系统。在本研究中，光纤干涉测量技术和波分复用技术都得到了应用，从而使光学探头和光学干涉仪间隔良好，能够进行快速表面扫描，为在线测量提供了灵活性。此外，该系统通过采用有源相位跟踪和稳定技术，提供自参考信号以稳定光学检测，并具有高共模噪声抑制能力。与未稳定的结果相比，低频噪声显著降低。对样品表面的测量显示，重复性达到了3.3纳米。
