Jiang Xiangqian, Wang Kaiwei, Gao Feng, Muhamedsalih Hussam
Centre for Precision Technologies, School of Computing and Engineering,University of Huddersfield, Huddersfield HD1 3DH, United Kingdom.
Appl Opt. 2010 May 20;49(15):2903-9. doi: 10.1364/AO.49.002903.
We introduce a new optical interferometry system for fast areal surface measurement of microscale and nanoscale surfaces that are immune to environmental noise. Wavelength scanning interferometry together with an acousto-optic tunable filtering technique is used to measure surfaces with large step heights. An active servo control system serves as a phase-compensating mechanism to eliminate the effects of environmental noise. The system can be used for online or in-process measurement on a shop floor. Measurement results from two step height standard samples and a structured surface of a semiconductor daughterboard are presented. In comparison with standard step height specimens, the system achieved nanometer measurement accuracy. The measurement results of the semiconductor daughterboard, under mechanical disturbance, showed that the system can withstand environmental noise.
我们推出了一种新型光学干涉测量系统，用于对微米级和纳米级表面进行快速面域测量，该系统不受环境噪声影响。波长扫描干涉测量法与声光可调滤波技术相结合，用于测量具有大台阶高度的表面。一个有源伺服控制系统作为相位补偿机制，以消除环境噪声的影响。该系统可用于车间的在线或过程测量。给出了两个台阶高度标准样品和一个半导体子板结构化表面的测量结果。与标准台阶高度样品相比，该系统实现了纳米级测量精度。半导体子板在机械干扰下的测量结果表明，该系统能够抵御环境噪声。
