Hu Kaixuan, Kim Jung H, Schmiedeler James, Menq Chia-Hsiang
Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio 43210, USA.
Rev Sci Instrum. 2008 Feb;79(2 Pt 1):025105. doi: 10.1063/1.2841804.
This paper presents the development of a new compact six-axis compliant stage employing piezoelectric actuators to achieve six-axis actuation with nanometer resolution. The integration of direct metrology in the object space, based on real-time visual feedback, enables high-precision motion control. In order to achieve greater motion range, the simple and compact decoupled mechanical structure utilizes two-tap displacement amplifiers for in-plane motion and semibridge amplifiers for out-of-plane motion. The kinematic analysis of the stage is presented. Laterally sampled white light interferometry was implemented to measure the out-of-plane motion of the stage, and a measurement model associated with the designed target patterns is developed to estimate the in-plane motion in real time. Together, they form a visual tracking system and are integrated with the six-axis compliant stage to realize precision six-axis real-time visual servo-control. Experimental results demonstrate that the six-axis compliant stage has the motion range of 77.42 microm, 67.45 microm, 24.56 microm, 0.93 mrad, 0.95 mrad, and 3.10 mrad, and the resolution of +/-5 nm, +/-8 nm, +/-10 nm, +/-10 murad, +/-10 murad, and +/-20 murad for x-axis, y-axis, and z-axis translation and rotation, respectively.
本文介绍了一种新型紧凑型六轴柔顺平台的研发，该平台采用压电致动器实现具有纳米分辨率的六轴驱动。基于实时视觉反馈的物体空间直接计量集成，实现了高精度运动控制。为了获得更大的运动范围，简单紧凑的解耦机械结构采用双抽头位移放大器进行平面内运动，半桥放大器进行平面外运动。给出了该平台的运动学分析。采用横向采样白光干涉测量法测量平台的平面外运动，并建立了与设计目标图案相关的测量模型以实时估计平面内运动。它们共同构成一个视觉跟踪系统，并与六轴柔顺平台集成，以实现精确的六轴实时视觉伺服控制。实验结果表明，该六轴柔顺平台的运动范围分别为77.42微米、67.45微米、24.56微米、0.93毫弧度、0.95毫弧度和3.10毫弧度，x轴、y轴和z轴平移及旋转的分辨率分别为±5纳米、±8纳米、±10纳米、±10微弧度、±10微弧度和±20微弧度。
