Lee M B, Kourogi M, Yatsui T, Tsutsui K, Atoda N, Ohtsu M
Advanced Optical Memory Research Group, National Institute for Advanced Interdisciplinary Research, 1-1-4 Higashi, Tsukuba, Ibaraki 305-8562, Japan.
Appl Opt. 1999 Jun 1;38(16):3566-71. doi: 10.1364/ao.38.003566.
We propose a novel, to our knowledge, silicon planar-apertured probe array as an optical head for high-density near-field optical storage. In comparison with a conventional fiber probe employed for near-field optical storage the apertured probe array has a higher readout data-transmission rate and better mechanical durability. A probe array with an aperture size of 100 nm was fabricated by use of photolithography and wet etching of a silicon wafer. Subwavelength-readout capability was demonstrated by use of one aperture of the probe array. Furthermore, we achieved a 16 times increase in the light-transmission efficiency of the probe array by installing glass-sphere microlenses on each aperture. The increase was confirmed by measurement of the near-field optical intensity.
据我们所知，我们提出了一种新型的硅平面孔径探针阵列作为高密度近场光存储的光学头。与用于近场光存储的传统光纤探针相比，孔径探针阵列具有更高的读出数据传输速率和更好的机械耐久性。通过对硅晶片进行光刻和湿法蚀刻，制备了孔径尺寸为100 nm的探针阵列。利用探针阵列的一个孔径展示了亚波长读出能力。此外，通过在每个孔径上安装玻璃球微透镜，我们使探针阵列的光传输效率提高了16倍。通过测量近场光强度证实了这种提高。
