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在AlGaAs-GaAs非对称外延波导中制造的表面光栅分布布拉格反射器量子阱激光器。

Surface-grating distributed bragg reflector quantum-well lasers fabricated in AlGaAs-GaAs asymmetric epitaxial waveguides.

作者信息

Yee H H, Ayling S, De La Rue R M

机构信息

Department of Electrical Engineering, National Taipei University of Technology, Taipei 10006, Taiwan.

出版信息

Appl Opt. 1999 Oct 20;38(30):6325-32. doi: 10.1364/ao.38.006325.

DOI:10.1364/ao.38.006325
PMID:18324159
Abstract

Ridge waveguide lasers, integrated with single deep-surface distributed Bragg reflectors (DBR's) in the passive section, were fabricated with a GaAs-AlGaAs double-quantum-well structure in an asymmetric waveguide. Third-order gratings, with a period of 389 nm and defined by holographic lithography, were formed by low-damage reactive ion etching processes. The grating losses and optical coupling coefficients were estimated, in particular, by use of the relationship between the real and the effective grating lengths that were computed and reexamined by measurements of grating periodicity and mode spacing. By use of two different geometries, we produced guide lines for obtaining high-performance lasing properties for these surface-grating DBR lasers. Additionally, a detailed analysis of lasing wavelength shifts was carried out for this study. It was found that injected-carrier-induced effects shift the lasing wavelength much more than gain-loss competition within an extended DBR laser cavity.

摘要

脊形波导激光器在无源区与单个深表面分布式布拉格反射器(DBR)集成,采用非对称波导中的GaAs - AlGaAs双量子阱结构制造。通过全息光刻定义的周期为389 nm的三阶光栅,由低损伤反应离子蚀刻工艺形成。特别是通过使用计算得到的实际光栅长度与有效光栅长度之间的关系,并通过光栅周期和模式间距的测量重新审视,估算了光栅损耗和光耦合系数。通过使用两种不同的几何结构,我们为这些表面光栅DBR激光器获得高性能激光特性生成了指导方针。此外,针对本研究对激光波长偏移进行了详细分析。结果发现,在扩展的DBR激光腔内,注入载流子引起的效应使激光波长的偏移比增益 - 损耗竞争大得多。

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