Arendse C J, Malgas G F, Scriba M R, Cummings F R, Knoesen D
National Centre for Nanostructured Materials, Council for Scientific and Industrial Research, P.0. Box 395, Pretoria 0001, South Africa.
J Nanosci Nanotechnol. 2007 Oct;7(10):3638-42. doi: 10.1166/jnn.2007.813.
Hot-filament chemical vapor deposition has developed into an attractive method for the synthesis of various carbon nanostructures, including carbon nanotubes. This is primarily due to its versatility, low cost, repeatability, up-scalability, and ease of production. The resulting nano-material synthesized by this technique is dependent on the deposition conditions which can be easily controlled. In this paper we report on the effect of the deposition pressure on the structural properties and morphology of carbon nanotubes synthesized by hot-filament chemical vapor deposition, using Raman spectroscopy and high-resolution scanning electron microscopy, respectively. A 10 nm-thick Ni layer, deposited on a SiO2/Si substrate, was used as catalyst for carbon nanotube growth. Multi-walled carbon nanotubes with diameters ranging from 20-100 nm were synthesized at 500 degrees C with high structural perfection at deposition pressures between 150 and 200 Torr. Raman spectroscopy measurements confirm that the carbon nanotube deposit is homogeneous across the entire substrate area.
热丝化学气相沉积已发展成为一种用于合成包括碳纳米管在内的各种碳纳米结构的有吸引力的方法。这主要归功于其多功能性、低成本、可重复性、可扩展性以及易于生产。通过该技术合成的所得纳米材料取决于易于控制的沉积条件。在本文中，我们分别使用拉曼光谱和高分辨率扫描电子显微镜，报告了沉积压力对通过热丝化学气相沉积合成的碳纳米管的结构性质和形态的影响。沉积在SiO2/Si衬底上的10nm厚的Ni层用作碳纳米管生长的催化剂。在500摄氏度、沉积压力介于150至200托之间的条件下，合成了直径范围为20至100nm的多壁碳纳米管，且具有高度的结构完整性。拉曼光谱测量证实，碳纳米管沉积物在整个衬底区域内是均匀的。
