Mathur Ashish, Tweedie Mark, Roy Susanta Sinha, Maguire P D, McLaughlin James A
Nanotechnology and Integrated Bio-Engineering Centre, School of Electrical and Mechanical Engineering, University of Ulster, Newtownabbey BT37 OQB, UK.
J Nanosci Nanotechnol. 2009 Jul;9(7):4392-6. doi: 10.1166/jnn.2009.m66.
Microwave plasma enhanced chemical vapour deposition (MPECVD) was used for the production of carbon nanotubes. Vertically aligned multi-walled carbon nanotubes (MWCNTs) were grown on silicon substrates coated with cobalt thin films of thickness ranging from 0.5 nm to 3 nm. Prior to the nanotube growth the catalyst were treated with N2 plasma for 5-10 minutes that break the films into small nanoparticles which favour the growth of nanotubes. The CNTs were grown at a substrate temperature of 700 degrees C for 5, 10 and 15 minutes. The height of the CNT films ranging from 10 microm-30 microm indicating that the initial growth rate of the CNTs are very high at a rate of approximately 100 nm/sec. Electrical resistivity of the above samples was evaluated from I-V measurements. The activation energy (E(a)) was also calculated from the temperature dependent studies and it was found that the E(a) lies in the range of 15-35 meV. Raman spectroscopy was used to identify the quality of the nanotubes.
微波等离子体增强化学气相沉积(MPECVD)被用于碳纳米管的制备。在涂覆有厚度范围为0.5纳米至3纳米的钴薄膜的硅衬底上生长垂直排列的多壁碳纳米管(MWCNT)。在纳米管生长之前,催化剂用N2等离子体处理5至10分钟,这会将薄膜分解成小的纳米颗粒,有利于纳米管的生长。碳纳米管在700摄氏度的衬底温度下生长5、10和15分钟。碳纳米管薄膜的高度范围为10微米至30微米,表明碳纳米管的初始生长速率非常高,约为100纳米/秒。通过I-V测量评估上述样品的电阻率。还从温度依赖性研究中计算出激活能(E(a)),发现E(a)在15至35毫电子伏特的范围内。拉曼光谱用于鉴定纳米管的质量。