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具有未校准相移的相移干涉测量法。

Phase-shifting interferometry with uncalibrated phase shifts.

作者信息

Chen X, Gramaglia M, Yeazell J A

机构信息

Department of Physics, The Pennsylvania State University, University Park, Pennsylvania 16802, USA.

出版信息

Appl Opt. 2000 Feb 1;39(4):585-91. doi: 10.1364/ao.39.000585.

Abstract

A computationally efficient algorithm for phase-shifting interferometry with imprecise phase shifts is developed. It permits the use of an uncalibrated phase shifter and is also insensitive to spatial intensity variations. The measurement has both spatial and temporal aspects. Comparisons are made between pixels within the same interferogram, and these comparisons are extended across a set of interferograms by a maximum-minimum procedure. A test experiment is performed and confirms the theoretical results. An additional advantage of the algorithm is that an error measure can be developed. This error measure is used to implement an error correction scheme.

摘要

开发了一种用于具有不精确相移的相移干涉测量的计算高效算法。它允许使用未校准的相移器,并且对空间强度变化也不敏感。测量具有空间和时间两个方面。在同一干涉图内的像素之间进行比较,并且通过最大 - 最小过程将这些比较扩展到一组干涉图上。进行了一个测试实验,证实了理论结果。该算法的另一个优点是可以开发一种误差度量。这种误差度量用于实施误差校正方案。

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