Han Xianxin, Wang Yuheng, Bu Zhengyang, Bu Xiaoya, Li Hongyun, Liu Shengde, Zhong Liyun, Lu Xiaoxu
Opt Express. 2024 Feb 12;32(4):6329-6341. doi: 10.1364/OE.510653.
Phase-shifting interferometry (PSI) requires accurate phase shifts between interferograms for realizing high-accuracy phase retrieval. This paper presents an adaptive PSI through synchronously capturing phase shifts measurement interferograms and phase measurement interferograms, in which the former is a series of spatial carrier frequency phase-shifting interferograms generated by an additional assembly and the phase shifts are calculated with the single-spectrum phase shifts measurement algorithm (SS-PSMA), the latter is employed for phase retrieval with an adaptive phase-shifting digital holography algorithm (PSDHA) based on complex amplitude recovery. In addition to exhibiting excellent reliability, high-accuracy phase retrieval (0.02 rad), and short calculation time (<25 ms), the proposed adaptive PSDHA is suitable for various interferograms with different fringe shapes and numbers. Importantly, both simulation analysis and experimental result demonstrate that this adaptive PSI based on PSDHA can effectively eliminate phase-shifting errors caused by phase shifter and external disturbance, ensuring high-accuracy phase shifts measurement and phase retrieval, meanwhile significantly reducing phase-shifting interferograms acquisition time and phase retrieval calculation time.
相移干涉术（PSI）需要干涉图之间精确的相移来实现高精度的相位恢复。本文提出了一种自适应PSI，通过同步采集相移测量干涉图和相位测量干涉图，其中前者是由一个附加组件生成的一系列空间载波频率相移干涉图，相移采用单谱相移测量算法（SS-PSMA）计算，后者用于基于复振幅恢复的自适应相移数字全息算法（PSDHA）进行相位恢复。除了具有出色的可靠性、高精度的相位恢复（0.02 rad）和较短的计算时间（<25 ms）外，所提出的自适应PSDHA适用于具有不同条纹形状和数量的各种干涉图。重要的是，仿真分析和实验结果均表明，这种基于PSDHA的自适应PSI能够有效消除由移相器和外部干扰引起的相移误差，确保高精度的相移测量和相位恢复，同时显著减少相移干涉图采集时间和相位恢复计算时间。
