Harasaki A, Schmit J, Wyant J C
Appl Opt. 2000 May 1;39(13):2107-15. doi: 10.1364/ao.39.002107.
We describe a method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution of phase-shifting interferometry without the interval-slope limitation of lambda/4 per data sample of phase-shifting interferometry. A five-frame algorithm is used to determine both the best-focus frame position and the fractional phase from the best-focus frame of the correlogram acquired through vertical scanning. The two surface profiles retrieved from the phase and the modulation contrast of the correlograms are compared in the phase-unwrapping process to remove fringe-order ambiguity.
我们描述了一种结合相移和相干峰传感技术的方法，该方法能够进行测量，具有相移干涉测量法的高度分辨率，且不受相移干涉测量法每个数据样本λ/4的间隔斜率限制。使用一种五帧算法来确定最佳聚焦帧位置以及通过垂直扫描获取的相关图的最佳聚焦帧中的分数相位。在相位展开过程中，比较从相关图的相位和调制对比度中检索到的两个表面轮廓，以消除条纹级模糊性。
