Xu L, Peng X, Miao J, Asundi A K
Appl Opt. 2001 Oct 1;40(28):5046-51. doi: 10.1364/ao.40.005046.
We propose an in-line digital microscopic holography system for testing of microstructures. With the incorporation of a long-distance microscope with digital holography, the system is capable of imaging test microstructures with high resolution at sufficient working distances to permit good illumination of samples. The system, which was developed in an in-line configuration, achieves high imaging capacity and exhibits properties that are favorable for micromeasurement. We demonstrate the performance of the system with experiments to determine the displacement of a silicon microcantilever and with investigations of the microscopic resolution capability.
我们提出了一种用于测试微观结构的在线数字显微全息系统。通过将长距离显微镜与数字全息技术相结合，该系统能够在足够的工作距离下以高分辨率对测试微观结构进行成像，从而实现对样品的良好照明。该系统采用在线配置开发，具有高成像能力，并展现出有利于微测量的特性。我们通过确定硅微悬臂梁位移的实验以及对微观分辨率能力的研究来证明该系统的性能。
