Maznev A A
Philips Advanced Metrology Systems, Natick, MA 01760, United States.
Ultrasonics. 2009 Jan;49(1):1-3. doi: 10.1016/j.ultras.2008.04.007. Epub 2008 Apr 29.
Surface acoustic wave (SAW) waveguide resonator is formed by a ring-shaped strip of copper 10 microm wide and approximately 130 microm in diameter embedded into a 0.8 microm thick layer of silica on a silicon wafer. SAWs are excited at one side of the copper ring by a short laser pulse focused into a spatially periodic pattern and detected via diffraction of the probe laser beam overlapped with the excitation spot. SAW wavepackets with central frequency 460 MHz travel around the ring and are detected each time they make a full circle and pass trough the probe spot. Potential applications of ring resonators for SAWs are discussed.
表面声波（SAW）波导谐振器由一条宽10微米、直径约130微米的环形铜带构成，该铜带嵌入硅晶片上0.8微米厚的二氧化硅层中。通过聚焦成空间周期性图案的短激光脉冲在铜环的一侧激发表面声波，并通过与激发点重叠的探测激光束的衍射进行检测。中心频率为460 MHz的表面声波包绕着环传播，每次它们完整地绕一圈并穿过探测点时都会被检测到。文中讨论了表面声波环形谐振器的潜在应用。
