Gupta Anjan K, Sinha Rajiv Shankar, Singh Reetesh Kumar
Department of Physics, Indian Institute of Technology Kanpur, Kanpur, India.
Rev Sci Instrum. 2008 Jun;79(6):063701. doi: 10.1063/1.2940234.
We report on the design and fabrication of a compact two-dimensional xy-positioner for scanning probe microscopes. This positioner uses three piezoelectric bimorphs in flexing or length-change mode by appropriate selection of electrodes and voltage polarities. One end of these bimorphs is fixed to a rectangular metal frame while on each of the free ends two sapphire disks are fixed which can slide against the polished plates of a platform movable in the xy-plane. For moving the platform by one step, the bimorphs are deformed sequentially in one mode and they are brought back to their undeformed state simultaneously. The motion of the positioner has been tested with an optical microscope and a homemade scanning tunneling microscope.
我们报告了一种用于扫描探针显微镜的紧凑型二维xy定位器的设计与制造。该定位器通过适当选择电极和电压极性，使用三个压电双晶片处于弯曲或长度变化模式。这些双晶片的一端固定在一个矩形金属框架上，而在每个自由端固定有两个蓝宝石盘，它们可以在xy平面内可移动平台的抛光板上滑动。为了使平台移动一步，双晶片在一种模式下依次变形，然后同时恢复到未变形状态。该定位器的运动已通过光学显微镜和自制扫描隧道显微镜进行了测试。
