Kang Dongwoo, Kim Jungjae, Lee Moon G, Gweon Daegab
Nano-Opto-Mechatronics Laboratory, Department of Mechanical Engineering, KAIST, 373-1 Guseong-Dong, Yuseong-Gu, Daejeon 305-701, Republic of Korea.
Rev Sci Instrum. 2008 Feb;79(2 Pt 1):026110. doi: 10.1063/1.2841807.
In this article, a linear piezoelectric stepping positioner developed by Kang et al. [Rev. Sci. Instrum. 78, 075112 (2007)] is extended to have a two degree of freedom XY linear motion and it is experimentally evaluated. A resolution less than 10 nm, a speed of over 0.5 mm/s, push forces of 17.9 and 19.5, and stiffnesses of 6.54 and 5.90 N/microm are attained while maintaining a compact size of 96x96x39 mm3 and the required power consumption of 102.74 W.
在本文中，Kang等人[《科学仪器评论》78, 075112 (2007)]开发的线性压电步进定位器被扩展为具有两自由度的XY线性运动，并进行了实验评估。在保持96x96x39 mm3的紧凑尺寸和102.74 W所需功耗的同时，实现了小于10 nm的分辨率、超过0.5 mm/s的速度、17.9和19.5的推力以及6.54和5.90 N/μm的刚度。
