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相对论磁控管中的金属氧化物结三重点阴极。

Metal-oxide-junction, triple point cathodes in a relativistic magnetron.

作者信息

Jordan N M, Gilgenbach R M, Hoff B W, Lau Y Y

机构信息

Plasma, Pulsed Power, and Microwave Laboratory, Department of Nuclear Engineering and Radiological Sciences, University of Michigan, Ann Arbor, MI 48109, USA.

出版信息

Rev Sci Instrum. 2008 Jun;79(6):064705. doi: 10.1063/1.2939397.

Abstract

Triple point, defined as the junction of metal, dielectric, and vacuum, is the location where electron emission is favored in the presence of a sufficiently strong electric field. To exploit triple point emission, metal-oxide-junction (MOJ) cathodes consisting of dielectric "islands" over stainless steel substrates have been fabricated. The two dielectrics used are hafnium oxide (HfO(x)) for its high dielectric constant and magnesium oxide (MgO) for its high secondary electron emission coefficient. The coatings are deposited by ablation-plasma-ion lithography using a KrF laser (0-600 mJ at 248 nm) and fluence ranging from 3 to 40 J/cm(2). Composition and morphology of deposited films are analyzed by scanning electron microscopy coupled with x-ray energy dispersive spectroscopy, as well as x-ray diffraction. Cathodes are tested on the Michigan Electron Long-Beam Accelerator with a relativistic magnetron, at parameters V=-300 kV, I=1-15 kA, and pulse lengths of 0.3-0.5 micros. Six variations of the MOJ cathode are tested, and are compared against five baseline cases. It is found that particulate formed during the ablation process improves the electron emission properties of the cathodes by forming additional triple points. Due to extensive electron back bombardment during magnetron operation, secondary electron emission also may play a significant role. Cathodes exhibit increases in current densities of up to 80 A/cm(2), and up to 15% improvement in current start up time, as compared to polished stainless steel cathodes.

摘要

三相点定义为金属、电介质和真空的交界处,是在足够强的电场存在下有利于电子发射的位置。为了利用三相点发射,已经制造了由不锈钢基板上的电介质“岛”组成的金属氧化物结(MOJ)阴极。所使用的两种电介质是具有高介电常数的氧化铪(HfO(x))和具有高二次电子发射系数的氧化镁(MgO)。通过使用KrF激光(248nm处0 - 600mJ)和能量密度范围为3至40J/cm(2)的烧蚀等离子体离子光刻来沉积涂层。通过扫描电子显微镜结合X射线能量色散光谱以及X射线衍射来分析沉积膜的成分和形态。在密歇根电子长束加速器上使用相对论磁控管对阴极进行测试,参数为V = -300kV,I = 1 - 15kA,脉冲长度为0.3 - 0.5微秒。测试了MOJ阴极的六种变体,并与五个基线情况进行比较。发现烧蚀过程中形成的颗粒通过形成额外的三相点改善了阴极的电子发射特性。由于磁控管运行期间广泛的电子反向轰击,二次电子发射也可能起重要作用。与抛光不锈钢阴极相比,阴极的电流密度增加高达80A/cm(2),电流启动时间最多可改善15%。

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