Akcöltekin Ender, Peters Thorsten, Meyer Ralf, Duvenbeck Andreas, Klusmann Miriam, Monnet Isabelle, Lebius Henning, Schleberger Marika
Nat Nanotechnol. 2007 May;2(5):290-4. doi: 10.1038/nnano.2007.109. Epub 2007 Apr 29.
In the search to develop tools that are able to modify surfaces on the nanometre scale, the use of heavy ions with energies of several tens of MeV is becoming more attractive. Low-energy ions are mostly stopped by nuclei, which causes the energy to be dissipated over a large volume. In the high-energy regime, however, the ions are stopped by electronic excitations, and the extremely local (approximately 10 nm3) nature of the energy deposition leads to the creation of nanosized 'hillocks' or nanodots under normal incidence. Usually, each nanodot results from the impact of a single ion, and the dots are randomly distributed. Here we demonstrate that multiple, equally spaced dots, each separated by a few tens of nanometres, can be created if a single high-energy xenon ion strikes the surface at a grazing angle. By varying this angle, the number of dots, as well as their spacing, can be controlled.
在开发能够在纳米尺度上修饰表面的工具的探索中，使用能量为几十兆电子伏特的重离子正变得越来越有吸引力。低能离子大多被原子核阻挡，这会导致能量在较大体积内耗散。然而，在高能状态下，离子通过电子激发而被阻挡，并且能量沉积的极其局部（约10立方纳米）的特性导致在正入射下形成纳米尺寸的“小丘”或纳米点。通常，每个纳米点是由单个离子的撞击产生的，并且这些点是随机分布的。在此我们证明，如果单个高能氙离子以掠射角撞击表面，就可以产生多个等间距的点，每个点之间相隔几十纳米。通过改变这个角度，可以控制点的数量及其间距。
