Huang Yi-Fan, Chattopadhyay Surojit, Jen Yi-Jun, Peng Cheng-Yu, Liu Tze-An, Hsu Yu-Kuei, Pan Ci-Ling, Lo Hung-Chun, Hsu Chih-Hsun, Chang Yuan-Huei, Lee Chih-Shan, Chen Kuei-Hsien, Chen Li-Chyong
Nat Nanotechnol. 2007 Dec;2(12):770-4. doi: 10.1038/nnano.2007.389. Epub 2007 Dec 2.
Nature routinely produces nanostructured surfaces with useful properties, such as the self-cleaning lotus leaf, the colour of the butterfly wing, the photoreceptor in brittlestar and the anti-reflection observed in the moth eye. Scientists and engineers have been able to mimic some of these natural structures in the laboratory and in real-world applications. Here, we report a simple aperiodic array of silicon nanotips on a 6-inch wafer with a sub-wavelength structure that can suppress the reflection of light at a range of wavelengths from the ultraviolet, through the visible part of the spectrum, to the terahertz region. Reflection is suppressed for a wide range of angles of incidence and for both s- and p-polarized light. The antireflection properties of the silicon result from changes in the refractive index caused by variations in the height of the silicon nanotips, and can be simulated with models that have been used to explain the low reflection from moth eyes. The improved anti-reflection properties of the surfaces could have applications in renewable energy and electro-optical devices for the military.
自然界经常产生具有有用特性的纳米结构表面,比如自清洁的荷叶、蝴蝶翅膀的颜色、海蛇尾的光感受器以及蛾眼所具有的抗反射特性。科学家和工程师已经能够在实验室和实际应用中模仿其中一些自然结构。在此,我们报告一种在6英寸晶圆上的简单非周期性硅纳米尖阵列,其具有亚波长结构,能够在从紫外光到光谱可见光部分再到太赫兹区域的一系列波长范围内抑制光的反射。对于广泛的入射角以及s偏振光和p偏振光,反射均被抑制。硅的抗反射特性源于硅纳米尖高度变化引起的折射率变化,并且可以用已用于解释蛾眼低反射的模型进行模拟。这些表面改进的抗反射特性可应用于可再生能源和军事用的电光设备。