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用飞秒激光写入熔融石英玻璃中的三维光学传感网络。

Three-dimensional optical sensing network written in fused silica glass with femtosecond laser.

作者信息

Zhang Haibin, Ho Stephen, Eaton Shane M, Li Jianzhao, Herman Peter R

机构信息

Edward S Rogers Department of Electrical and Computer Engineering, Institute of Optical SciencesUniversity of Toronto, Toronto, ON, Canada.

出版信息

Opt Express. 2008 Sep 1;16(18):14015-23. doi: 10.1364/oe.16.014015.

DOI:10.1364/oe.16.014015
PMID:18773012
Abstract

A single-step fast-writing method of burst ultrafast laser modification was applied to form a mesh network of multi-wavelength Bragg grating waveguides in bulk fused silica glass. Strain-optic and thermo-optic responses of the laser-written internal sensors are reported for the first time. A dual planar layout provided independent temperature- and strain-compensated characterization of temperature and strain distribution with coarse spatial resolution. The grating responses were thermally stable to 500 masculineC. To our best knowledge, the grating network represents the first demonstration of 3D distributed optical sensing network in a bulk transparent medium. Such 3D grating networks open new directions for strain and temperature sensing in optical circuits, optofluidic, MEMS or lab-on-a-chip microsystems, actuators, and windows and other large display or civil structures.

摘要

采用单步快速写入的突发超快激光改性方法,在块状熔融石英玻璃中形成多波长布拉格光栅波导的网状网络。首次报道了激光写入内部传感器的应变光学和热光响应。双平面布局提供了具有粗略空间分辨率的温度和应变分布的独立温度和应变补偿表征。光栅响应在500℃时热稳定。据我们所知,该光栅网络是块状透明介质中3D分布式光学传感网络的首次演示。这种3D光栅网络为光电路、光流体、MEMS或芯片实验室微系统、致动器以及窗户和其他大型显示器或民用结构中的应变和温度传感开辟了新方向。

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Three-dimensional optical sensing network written in fused silica glass with femtosecond laser.用飞秒激光写入熔融石英玻璃中的三维光学传感网络。
Opt Express. 2008 Sep 1;16(18):14015-23. doi: 10.1364/oe.16.014015.
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引用本文的文献

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Instrumented Flexible Glass Structure: A Bragg Grating Inscribed with Femtosecond Laser Used as a Bending Sensor.仪器化柔性玻璃结构:一种用飞秒激光写入布拉格光栅作为弯曲传感器
Sensors (Basel). 2023 Sep 22;23(19):8018. doi: 10.3390/s23198018.
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Laser-written photonic crystal optofluidics for electrochromatography and spectroscopy on a chip.用于芯片上的电色谱和光谱分析的激光写入光子晶体光流体学
Biomed Opt Express. 2013 Jul 31;4(8):1472-85. doi: 10.1364/BOE.4.001472. eCollection 2013.
3
Microfabrication and applications of opto-microfluidic sensors.
微纳制造及光学生物传感器的应用
Sensors (Basel). 2011;11(5):5360-82. doi: 10.3390/s110505360. Epub 2011 May 18.