Amez-Droz Loïc, Tunon de Lara Matéo, Collette Christophe, Caucheteur Christophe, Lambert Pierre
Department of Aerospace and Mechanical Engineering, Université de Liège, Allée de la Découverte 9, 4000 Liege, Belgium.
TIPs Department, CP 165/67, Université libre de Bruxelles, 50 av FD Roosevelt, 1050 Brussels, Belgium.
Sensors (Basel). 2023 Sep 22;23(19):8018. doi: 10.3390/s23198018.
Fused silica glass is a material with outstanding mechanical, thermal and optical properties. Being a brittle material, it is challenging to shape. In the last decade, the manufacturing of monolithic flexible mechanisms in fused silica has evolved with the femtosecond-laser-assisted etching process. However, instrumenting those structures is demanding. To address this obstacle, this article proposes to inscribe a Bragg Grating sensor inside a flexure and interface it with an optical fibre to record the strain using a spectrum analyser. The strain sensitivity of this Bragg Grating sensor is characterized at 1.2 pm/μϵ (1 μϵ = 1 microstrain). Among other applications, deformation sensing can be used to record a force. Its use as a micro-force sensor is estimated. The sensor resolution is limited by our recording equipment to 30 μN over a measurement range above 10 mN. This technology can offer opportunities for surgery applications or others where precision and stability in harsh environments are required.
熔融石英玻璃是一种具有出色机械、热学和光学性能的材料。作为一种脆性材料，其成型具有挑战性。在过去十年中，通过飞秒激光辅助蚀刻工艺，熔融石英整体柔性机构的制造得到了发展。然而，对这些结构进行仪器化操作要求很高。为解决这一障碍，本文提出在挠曲结构内部刻写布拉格光栅传感器，并将其与光纤连接，以便使用光谱分析仪记录应变。该布拉格光栅传感器的应变灵敏度经表征为1.2 pm/με（1 με = 1微应变）。在其他应用中，变形传感可用于记录力。对其作为微力传感器的用途进行了评估。在高于10 mN的测量范围内，传感器分辨率受我们的记录设备限制为30 μN。这项技术可为手术应用或其他需要在恶劣环境中具备精度和稳定性的应用提供机会。
