Geldhauser T, Leiderer P, Boneberg J, Walheim S, Schimmel Th
University of Konstanz, Universitatsstr, Konstanz, Germany.
Langmuir. 2008 Nov 18;24(22):13155-60. doi: 10.1021/la801812j. Epub 2008 Oct 25.
Single pulse laser interference lithography is used to structure self-assembled monolayers of thiols on gold. This structuring process is investigated by attenuated total reflection measurements, and a demixing process of a binary polymer blend is used to visualize the produced surface energy pattern. The lithography can be realized with different wavelengths (266, 532, and 1064 nm) which shows that the structuring is a thermal process. As a first demonstration of this process, structures down to 800 nm period and 300 nm width are fabricated.
单脉冲激光干涉光刻技术用于在金表面构建硫醇自组装单分子层。通过衰减全反射测量对该结构化过程进行研究,并利用二元聚合物共混物的相分离过程来可视化所产生的表面能图案。该光刻技术可使用不同波长(266、532和1064纳米)实现,这表明结构化是一个热过程。作为该过程的首次演示,制作出了周期低至800纳米、宽度为300纳米的结构。