基于 LiTaO(3) 的 STW 谐振器中 SiO(2) 层中的 Love 波。

Love waves in SiO(2) layers on STW-resonators based on LiTaO(3).

机构信息

Forschungszentrum Karlsruhe GmbH, Institut für Instrumentelle Analytik, P.O. Box 3640, D-76021 Karlsruhe, Germany.

出版信息

Talanta. 2004 Jan 9;62(1):71-9. doi: 10.1016/S0039-9140(03)00407-7.

Abstract

We present first studies of sensitivity increase of commercially available Murata SAF 380-type surface acoustic wave (SAW) devices by the excitation of Love waves. Sputtered SiO(2) is studied as wave-guiding layer. Excitation of Love waves on such devices is investigated both theoretically and experimentally. It is demonstrated that the application of an optimized wave-guiding layer increases the sensitivity. Both theoretical predictions and experiments yield an optimum layer thickness for maximum mass sensitivity between 3 and 4mum for the given system.

摘要

我们首次研究了通过激励乐甫波来提高市售村田 SAF380 型声表面波（SAW）器件的灵敏度。研究了溅射二氧化硅（SiO2）作为波导层。从理论和实验两方面研究了此类器件上乐甫波的激励。结果表明，应用优化的波导层可以提高灵敏度。理论预测和实验都表明，对于给定系统，在 3 到 4 微米的范围内存在一个最佳的层厚，可获得最大的质量灵敏度。