Irino T, Shimizu Y
Basic Res. Lab., NTT, Tokyo.
IEEE Trans Ultrason Ferroelectr Freq Control. 1989;36(2):159-67. doi: 10.1109/58.19146.
The characteristics of a Stoneley wave propagated along an interface between a piezoelectric material and an isotropic material were investigated both theoretically and experimentally. First, the condition for the existence of Stoneley waves was shown for various piezoelectric materials. A rule of thumb for selecting the combination of the two materials was obtained. Then, LiTaO(3) was selected as the piezoelectric material and SiO(2) was selected the isotropic material. After the calculation of the Stoneley wave characteristics, actual devices were fabricated and measured. The experimental results were found to be in good agreement with the theory; zero slope temperature and high electromechanical coupling coefficient ( K(2)=1.5%) were obtained for Stoneley wave propagation between SiO(2)/X-148 degrees LiTaO(3). As a result, future surface-acoustic-wave (SAW) devices can be made without any package.
研究了沿压电材料与各向同性材料界面传播的斯通利波的特性，包括理论研究和实验研究。首先，针对各种压电材料给出了斯通利波存在的条件。得到了选择这两种材料组合的经验法则。然后，选择钽酸锂（LiTaO₃）作为压电材料，选择二氧化硅（SiO₂）作为各向同性材料。在计算了斯通利波特性之后，制作并测量了实际器件。实验结果与理论结果吻合良好；在SiO₂/X - 148°钽酸锂之间传播的斯通利波获得了零斜率温度和高机电耦合系数（K² = 1.5%）。结果，未来的表面声波（SAW）器件无需任何封装即可制造。
