Kim Keekyoung, Liu Xinyu, Zhang Yong, Cheng Ji, Yu Wu Xiao, Sun Yu
Advanced Micro and Nanosystems Laboratory, University of Toronto, 5 King's College Road, Toronto, Ontario M5S3G8, Canada.
Biomed Microdevices. 2009 Apr;11(2):421-7. doi: 10.1007/s10544-008-9248-6.
This paper reports a monolithic, force-feedback MEMS (microelectomechanical systems) microgripper and its application to micro-scale compression testing of swollen hydrogel microcapsules at wet state during manipulation. The single-chip microgripper integrates an electrothermal microactuator and two capacitive force sensors, one for contact detection (force resolution: 38.5 nN) and the other for gripping force measurements (force resolution: 19.9 nN). With the capability of resolving gripping forces down to 19.9 nN and material deformations with a 20.5 nm resolution, the system quantified Young's modulus values and viscoelastic parameters of alginate microcapsules (15-25 microm), demonstrating an easy-to-operate, accurate compression testing technique for characterizing soft, micrometer-sized biomaterials.
本文报道了一种单片式、力反馈微机电系统（MEMS）微夹钳及其在操作过程中对湿态肿胀水凝胶微胶囊进行微尺度压缩测试的应用。该单芯片微夹钳集成了一个电热微致动器和两个电容式力传感器，一个用于接触检测（力分辨率：38.5 nN），另一个用于夹持力测量（力分辨率：19.9 nN）。该系统能够分辨低至19.9 nN的夹持力以及具有20.5 nm分辨率的材料变形，从而量化了藻酸盐微胶囊（15 - 25微米）的杨氏模量值和粘弹性参数，展示了一种用于表征柔软的微米级生物材料的易于操作、准确的压缩测试技术。
