Bellouard Y, Barthel E, Said A A, Dugan M, Bado P
Mechanical Engineering Department, Eindhoven University of Technology, Eindhoven, the Netherlands.
Opt Express. 2008 Nov 24;16(24):19520-34. doi: 10.1364/oe.16.019520.
Low energy femtosecond laser pulses locally increase the refractive index and the hydro-fluoric acid etching rate of fused silica. These phenomena form the basis of a direct-write method to fabricate integrated glass devices that are of particular interest for optofluidics and optomechanical applications. Yet the underlying physical mechanism behind these effects remains elusive, especially the role of the laser polarization. Using Scanning Thermal Microscope and Raman spectrometer we observe in laser affected zones, a localized sharp decrease of the thermal conductivity correlated with an increased presence of low-number SiO(2) cycles. In addition, we find that a high correlation exists between the amount of structural changes and the decrease of thermal conductivity. Furthermore, sub-wavelength periodic patterns are detected for high peak power exposures. Finally, our findings indicate that, to date, the localized densification induced by femtosecond laser pulses remains well below the theoretical value achievable in mechanically densified silica.
低能量飞秒激光脉冲会局部提高熔融石英的折射率和氢氟酸蚀刻速率。这些现象构成了一种直写方法的基础,该方法用于制造集成玻璃器件,这些器件在光流体和光机械应用中特别受关注。然而,这些效应背后的潜在物理机制仍然难以捉摸,尤其是激光偏振的作用。使用扫描热显微镜和拉曼光谱仪,我们在激光作用区域观察到,热导率局部急剧下降,这与低数量SiO(2)环的增加有关。此外,我们发现结构变化量与热导率下降之间存在高度相关性。此外,对于高峰值功率曝光,检测到亚波长周期性图案。最后,我们的研究结果表明,迄今为止,飞秒激光脉冲引起的局部致密化仍远低于机械致密化二氧化硅可达到的理论值。