Kantsyrev V L, Safronova A S, Williamson K M, Wilcox P, Ouart N D, Yilmaz M F, Struve K W, Voronov D L, Feshchenko R M, Artyukov I A, Vinogradov A V
Physics Department, University of Nevada, Reno, Nevada 89557, USA.
Rev Sci Instrum. 2008 Oct;79(10):10F542. doi: 10.1063/1.2957934.
New extreme ultraviolet (EUV) spectroscopic diagnostics of relatively low-temperature plasmas based on the application of an EUV spectrometer and fast EUV diodes combined with glass capillary optics is described. An advanced high resolution dispersive element sliced multilayer grating was used in the compact EUV spectrometer. For monitoring of the time history of radiation, filtered fast EUV diodes were used in the same spectral region (>13 nm) as the EUV spectrometer. The radiation from the plasma was captured by using a single inexpensive glass capillary that was transported onto the spectrometer entrance slit and EUV diode. The use of glass capillary optics allowed placement of the spectrometer and diodes behind the thick radiation shield outside the direction of a possible hard x-ray radiation beam and debris from the plasma source. The results of the testing and application of this diagnostic for a compact laser plasma source are presented. Examples of modeling with parameters of plasmas are discussed.
本文描述了一种基于极紫外（EUV）光谱仪和快速EUV二极管与玻璃毛细管光学器件相结合的相对低温等离子体的新型EUV光谱诊断方法。紧凑型EUV光谱仪中使用了先进的高分辨率色散元件切片多层光栅。为了监测辐射的时间历程，在与EUV光谱仪相同的光谱区域（>13 nm）中使用了经过滤的快速EUV二极管。等离子体发出的辐射通过一根廉价的玻璃毛细管进行收集，该毛细管将辐射传输到光谱仪的入口狭缝和EUV二极管处。玻璃毛细管光学器件的使用使得光谱仪和二极管能够放置在厚辐射屏蔽的后面，处于可能的硬X射线辐射束和等离子体源碎片的方向之外。文中给出了该诊断方法在紧凑型激光等离子体源上的测试和应用结果，并讨论了等离子体参数建模的示例。
