Yu Jong-Su, Jo Jeongdai, Kim Dong-Soo, Kim Do-Jin
Department of Materials Science and Engineering, Chung nam National University, Daejeon 305-764, Korea.
J Nanosci Nanotechnol. 2008 Oct;8(10):4940-4. doi: 10.1166/jnn.2008.1122.
The contact electrodes of printed organic thin-film transistors (OTFTs) were fabricated by direct printing using patterned hard poly(dimethylsiloxane) (h-PDMS) stamp with injection channel onto flexible poly(ethylenenaphthalate) (PEN) plastic substrates, wherein low-viscosity and low-resistance conductive nanoparticle silver (Ag) ink was injected. The source and drain electrodes (W/L = 500 microm/5 microm, 500 microm/10 microm, and 500 microm/20 microm) of printed OTFT were fabricated by direct printing. The printed OTFT with polyvinylphenol (PVP) as polymer dielectric layer was formed by spin coating and poly(3-hexylthiopene-2,5-dily) (P3HT) as organic semiconductor layer was ink-jet printing. The printed OTFT was characterized in air and the following parameters were obtained: a mobility of 0.06 (+/- 0.02) cm2/Vs, an on/off current ratio of 10(4) and a subthreshold slope of 2.53 V/decade. The direct printing using patterned h-PDMS stamp for ink injection patterning made it be possible to fabricate printed OTFT with a channel length as below as to 5 microm. The number of steps in the fabrication process was reduced by 20 steps compared with photolithography.
印刷有机薄膜晶体管（OTFT）的接触电极是通过使用带有注入通道的图案化硬聚二甲基硅氧烷（h-PDMS）印章在柔性聚萘二甲酸乙二酯（PEN）塑料基板上直接印刷制成的，其中注入了低粘度和低电阻的导电纳米颗粒银（Ag）墨水。印刷OTFT的源极和漏极（W/L = 500微米/5微米、500微米/10微米和500微米/20微米）通过直接印刷制成。以聚乙烯基苯酚（PVP）作为聚合物介电层的印刷OTFT通过旋涂形成，以聚（3-己基噻吩-2,5-二亚基）（P3HT）作为有机半导体层通过喷墨印刷形成。在空气中对印刷OTFT进行了表征，并获得了以下参数：迁移率为0.06（±0.02）cm²/Vs，开/关电流比为10⁴，亚阈值斜率为2.53 V/十倍频程。使用图案化h-PDMS印章进行墨水注入图案化的直接印刷使得能够制造沟道长度低至5微米的印刷OTFT。与光刻相比，制造过程中的步骤数量减少了20步。
