Gui L, Hu H, Garcia-Granda M, Sohler W
Angewandte Physik, Universität Paderborn, 33098 Paderborn, Germany.
Opt Express. 2009 Mar 2;17(5):3923-8. doi: 10.1364/oe.17.003923.
Fabrication, characterization and application of periodical ferroelectric domains in ridges and Ti in-diffused ridge waveguides on X- and Y-cut Lithium Niobate (LN) are reported. The ridge waveguides of 3.5 microm height and 9 microm width were fabricated by inductively coupled plasma (ICP) etching followed by Ti in-diffusion into the ridges only. Appropriate electrodes on their side walls enabled domain inversion restricted to the ridge. The domain structure was investigated by selective chemical etching. Second harmonic generation in a 1.4 cm long ridge waveguide on an X-cut substrate was demonstrated at 1548 nm fundamental wavelength with an efficiency of 17% W(-1).
报道了在X切和Y切铌酸锂（LN）上的脊形结构以及Ti扩散脊形波导中周期性铁电畴的制备、表征及应用。通过电感耦合等离子体（ICP）蚀刻制备出高度为3.5微米、宽度为9微米的脊形波导，随后仅将Ti扩散到脊形结构中。在其侧壁上设置合适的电极可使畴反转局限于脊形区域。通过选择性化学蚀刻研究畴结构。在X切衬底上1.4厘米长的脊形波导中，在1548纳米基波波长下实现了二次谐波产生，效率为17%W⁻¹。
