Excitation of gap modes in a metal particle-surface system for sub-30 nm plasmonic lithography.

In this Letter, a near-field optical excitation of gap modes in a metal particle-surface system for patterning periodic nanostructure is proposed and numerically demonstrated using the finite-difference time-domain method. It is observed that high-density sub-30 nm periodic structures were achievable by employing an aluminium nanosphere-silver surface system. A 2D resist profile cross section using the modified cellular automata model, which was obtained through this proposed configuration, is also presented.