Maeo Shuji, Krämer Markus, Taniguchi Kazuo
Department of Electronics and Applied Physics, Osaka Electro-Communication University, 18-8 Hatsu-cho, Neyagawa, Osaka 572-8530, Japan.
Rev Sci Instrum. 2009 Mar;80(3):033108. doi: 10.1063/1.3095551.
A microfocus x-ray tube with multiple targets and an electron gun with a focal spot size of 10 microm in diameter has been developed. The electron gun contains a LaB(6) cathode and an Einzel lens. The x-ray tube can be operated at 50 W (50 kV, 1 mA) and has three targets, namely, Cr, W, and Rh on the anode that can be selected completely by moving the anode position. A focal spot size of 10 microm in diameter can be achieved at 0.5 mA current. As demonstration of the usability of a multiexcitation x-ray tube, the fluorescence x-rays have been measured using a powder specimen mixed of TiO(2), Co, and Zr of the same quantity. The differences of excitation efficiency have clearly appeared according to the change in excitation source. From the results discussed here, it can be expected that the presented x-ray tube will be a powerful tool in microx-ray fluorescence spectrometers and various x-ray instruments.
已经研制出一种具有多个靶的微焦点X射线管和一种焦点尺寸为直径10微米的电子枪。该电子枪包含一个LaB(6)阴极和一个单透镜。该X射线管可以在50瓦（50千伏，1毫安）下运行，并且在阳极上有三个靶，即Cr、W和Rh，通过移动阳极位置可以完全选择。在0.5毫安电流下可实现直径为10微米的焦点尺寸。作为多激发X射线管可用性的演示，使用由相同数量的TiO(2)、Co和Zr混合而成的粉末试样测量了荧光X射线。根据激发源的变化，激发效率的差异已经明显显现。从这里讨论的结果可以预期，所提出的X射线管将成为微X射线荧光光谱仪和各种X射线仪器中的一种强大工具。
