Adaptive spatially resolving detector for the extreme ultraviolet with absolute measuring capability.

A spatially resolving detector for the extreme ultraviolet (XUV) and soft x-ray spectral region is presented. Principle of operation is conversion of XUV radiation to visible light by a scintillator crystal. Luminescence is detected using charge coupled device camera and imaging optics. Single layer and multilayer coatings are applied to match the system to different spectral regions of interest. Field of view and spatial resolution can be adapted to the application. Calibration of the system enables to absolutely measure in-band radiation flux on the scintillator. The setup is designed for the characterization and optimization of XUV sources and XUV optical systems. Measurements, carried out to characterize the focus in a soft x-ray microscope, are presented as an application example.