McMackin L, Voelz D, Fetrow M
Opt Express. 1997 Nov 24;1(11):332-7. doi: 10.1364/oe.1.000332.
Multiple wavelength interferometry is combined with a heterodyne array sensing technique to provide an approach for measuring highly aberrated optical surfaces. Interferometric measurements created with long effective wavelengths are obtained by digitally combining complex exposures collected at different optical wavelengths. The heterodyne array sensing method is straightforward to implement and holds promise for rapid wavefront measurements with high spatial and phase resolution. Measurements of a tilted, flat surface are presented and analyzed.
多波长干涉测量法与外差阵列传感技术相结合,提供了一种测量高度像差光学表面的方法。通过对在不同光学波长下采集的复杂曝光进行数字组合,可以获得具有长有效波长的干涉测量结果。外差阵列传感方法易于实现,有望实现具有高空间和相位分辨率的快速波前测量。本文给出并分析了对倾斜平面的测量结果。