紫外波长下可见光光子计数器的量子效率增强。

Enhanced quantum efficiency of the visible light photon counter in the ultraviolet wavelengths.

作者信息

McKay Kyle S, Kim Jungsang, Hogue Henry H

机构信息

Fitzpatrick Institute for Photonics, Electrical and Computer Engineering Department, Duke University, Durham, NC 27708, USA.

出版信息

Opt Express. 2009 Apr 27;17(9):7458-64. doi: 10.1364/oe.17.007458.

DOI:10.1364/oe.17.007458

PMID:19399124

Abstract

The visible light photon counter (VLPC) is a very high quantum efficiency (QE, 88% at 694 nm) single photon detector in the visible wavelengths. The QE in the ultraviolet (UV) wavelenghths is poor in these devices due to absorption in the degenerate front contact. We introduce the ultraviolet photon counter (UVPC), where the QE in the near UV wavelength range (300-400 nm) is dramatically enhanced. The degenerate Si front contact of the VLPC is replaced with a Ti Schottky contact, which reduces the absorption of incident photons within the contact layer. We demonstrate a system QE of 5.3% at 300 nm and 11% at 370 nm for a UVPC with a Ti Schottky contact and a single layer MgF(2) antireflection coating.

摘要

可见光光子计数器（VLPC）是一种在可见光波长范围内具有非常高量子效率（在694纳米处为88%）的单光子探测器。由于简并前接触层中的吸收，这些器件在紫外（UV）波长下的量子效率较低。我们引入了紫外光子计数器（UVPC），其在近紫外波长范围（300 - 400纳米）内的量子效率得到了显著提高。VLPC的简并硅前接触被钛肖特基接触所取代，这减少了接触层内入射光子的吸收。对于具有钛肖特基接触和单层MgF₂抗反射涂层的UVPC，我们展示了在300纳米处系统量子效率为5.3%，在370纳米处为11%。