Xie H, Rakotondrabe M, Régnier S
Institute of Intelligent System and Robotics, University of Pierre and Marie Curie/CNRS UMR 7222, 4 Place Jussieu, 75005 Paris, France.
Rev Sci Instrum. 2009 Apr;80(4):046102. doi: 10.1063/1.3115184.
A method using atomic force microscope (AFM) optical levers and a reference nanopositioning stage has been developed to characterize piezoscanner hysteresis and creep. The piezoscanner is fixed on a closed-loop nanopositioning stage, both of which have the same arrangement on each axis of the three spatial directions inside the AFM-based nanomanipulation system. In order to achieve characterization, the optical lever is used as a displacement sensor to measure the relative movement between the nanopositioning stage and the piezoscanner by lateral tracking a well-defined slope with the tapping mode of the AFM cantilever. This setup can be used to estimate a piezoscanner's voltage input with a reference displacement from the nanopositioning stage. The hysteresis and creep were accurately calibrated by the method presented, which use the current setup of the AFM-based nanomanipulation system without any modification or additional devices.
一种利用原子力显微镜（AFM）光杠杆和参考纳米定位平台来表征压电扫描器滞后和蠕变的方法已经被开发出来。压电扫描器固定在一个闭环纳米定位平台上，在基于AFM的纳米操纵系统内部的三个空间方向的每个轴上，它们都有相同的布置。为了实现表征，光杠杆被用作位移传感器，通过在AFM悬臂的轻敲模式下横向跟踪一个明确的斜率来测量纳米定位平台和压电扫描器之间的相对运动。这种设置可用于根据纳米定位平台的参考位移来估计压电扫描器的电压输入。所提出的方法通过使用基于AFM的纳米操纵系统的当前设置，无需任何修改或额外设备，就准确地校准了滞后和蠕变。
