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硅原子力显微镜悬臂的校准。

Calibration of silicon atomic force microscope cantilevers.

作者信息

Gibson Christopher T, Alastair Smith D, Roberts Clive J

机构信息

Department of Physics and Astronomy, University of Leeds, Woodhouse Lane, Leeds LS2 9JT, UK.

出版信息

Nanotechnology. 2005 Feb;16(2):234-8. doi: 10.1088/0957-4484/16/2/009. Epub 2005 Jan 7.

DOI:10.1088/0957-4484/16/2/009
PMID:21727428
Abstract

We present a comparison of three different methods to calibrate the spring constant of two different types of silicon beam shaped atomic force microscope (AFM) cantilevers to determine each method's accuracy, ease of use and potential destructiveness. The majority of research in calibrating AFM cantilevers has been concerned with contact mode levers. The two types of levers we have studied are used in force modulation and tapping mode in air. Not only can these types of cantilevers have spring constants an order of magnitude greater than contact mode levers, but also their geometries can be quite different from the standard V-shape contact lever. In this work we experimentally determine the correction factors for two of the calibration methods when applied to the tapping mode cantilevers and also demonstrate that the force modulation levers can be calibrated easily and accurately using these same techniques.

摘要

我们对三种不同的方法进行了比较,这三种方法用于校准两种不同类型的硅梁形原子力显微镜(AFM)悬臂的弹簧常数,以确定每种方法的准确性、易用性和潜在破坏性。校准AFM悬臂的大多数研究都集中在接触模式悬臂上。我们研究的两种类型的悬臂用于空气中的力调制和轻敲模式。这些类型的悬臂不仅弹簧常数可能比接触模式悬臂大一个数量级,而且它们的几何形状可能与标准的V形接触悬臂有很大不同。在这项工作中,我们通过实验确定了两种校准方法应用于轻敲模式悬臂时的校正因子,并且还证明了使用这些相同技术可以轻松、准确地校准力调制悬臂。

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