Lin Dejiao, Jiang Xiangqian, Xie Fang, Zhang Wei, Zhang Lin, Bennion Ian
Opt Express. 2004 Nov 15;12(23):5729-34. doi: 10.1364/opex.12.005729.
We propose a self-reference multiplexed fiber interferometer (MFI) by using a tunable laser and fiber Bragg grating (FBG). The optical measurement system multiplexes two Michelson fiber interferometers with shared optical path in the main part of optical system. One fiber optic interferometer is used as a reference interferometer to monitor and control the high accuracy of the measurement system under environmental perturbations. The other is used as a measurement interferometer to obtain information from the target. An active phase tracking homodyne (APTH) technique is applied for signal processing to achieve high resolution. MFI can be utilized for high precision absolute displacement measurement with different combination of wavelengths from the tunable laser. By means of Wavelength-Division-Multiplexing (WDM) technique, MFI is also capable of realizing on-line surface measurement, in which traditional stylus scanning is replaced by spatial light-wave scanning so as to greatly improve the measurement speed and robustness.
我们提出了一种通过使用可调谐激光器和光纤布拉格光栅（FBG）的自参考复用光纤干涉仪（MFI）。该光学测量系统在光学系统的主要部分复用了两个具有共享光路的迈克尔逊光纤干涉仪。一个光纤干涉仪用作参考干涉仪，以在环境扰动下监测和控制测量系统的高精度。另一个用作测量干涉仪，以从目标获取信息。采用有源相位跟踪零差（APTH）技术进行信号处理以实现高分辨率。MFI可用于利用可调谐激光器不同波长组合进行高精度绝对位移测量。借助波分复用（WDM）技术，MFI还能够实现在线表面测量，其中传统的触针扫描被空间光波扫描所取代，从而大大提高测量速度和鲁棒性。
