Rattenberger J, Wagner J, Schröttner H, Mitsche S, Zankel A
Institute for Electron Microscopy, Graz University of Technology, Graz, Austria.
Scanning. 2009 May-Jun;31(3):107-13. doi: 10.1002/sca.20148.
A method is presented to determine the total scattering cross section of imaging gases used in low-vacuum scanning electron microscopy or environmental scanning electron microscopy. Experimental results are presented for water vapor, nitrogen gas and ambient air for primary beam electron energies between 5 and 30 keV. The measured results are compared and discussed with calculated values. This method allows the effective beam gas path length (BGPL) to be determined. The variations of the effective BGPL with varying chamber pressure are presented.
提出了一种用于确定低真空扫描电子显微镜或环境扫描电子显微镜中使用的成像气体的总散射截面的方法。给出了在5至30keV的一次束电子能量下，水蒸气、氮气和环境空气的实验结果。将测量结果与计算值进行了比较和讨论。该方法能够确定有效束气路径长度（BGPL）。给出了有效BGPL随腔室压力变化的情况。
