Lin C H, Yang Y J, Encinas E, Chen W Y, Tsai J J, Liu C W
Department of Electrical Engineering and Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan, R.O.C.
J Nanosci Nanotechnol. 2009 Jun;9(6):3622-6. doi: 10.1166/jnn.2009.ns40.
A simple Ge-on-glass metal-oxide-semiconductor solar cell has been demonstrated by wafer bonding and smart-cut. Since single crystalline Ge is directly bonded on glass, the crystalline substrate is not necessary. The metal-oxide-semiconductor structure can be easily fabricated without n and p dopant diffusion or implantation. The reason for low efficiency is discussed, and then the optimized structures are designed by simulation. An outstanding enhancement on efficiency can be achieved with the Si/Ge/Si structure. The best performance can be achieved by optimization of the position of the Ge layer, the thickness of the Ge layer, and the number of the Ge layers. The efficiency of the thin film Si/Ge/Si solar cell with single layer of 30-nm-thick Ge outside the depletion region reaches 15.9%, as compared to the control Si sample of 11.8%. Based on the simulation and technologies, high efficiency thin film solar cells can be demonstrated in the future.
通过晶圆键合和智能切割展示了一种简单的玻璃上锗金属氧化物半导体太阳能电池。由于单晶硅锗直接键合在玻璃上,因此不需要晶体衬底。金属氧化物半导体结构可以很容易地制造,无需进行n型和p型掺杂剂扩散或注入。讨论了效率低的原因,然后通过模拟设计了优化结构。采用Si/Ge/Si结构可显著提高效率。通过优化锗层的位置、锗层的厚度和锗层的数量可实现最佳性能。与11.8%的对照硅样品相比,耗尽区外具有单层30纳米厚锗的薄膜Si/Ge/Si太阳能电池的效率达到15.9%。基于模拟和技术,未来可以展示出高效薄膜太阳能电池。