Lee Cheng-Chung, Wu Kai, Chen Sheng-Hui, Ma Sheng-Ju
Department of Optics and Photonics/Thin Film Technology Center, National Central University, 320, Taiwan.
Opt Express. 2007 Dec 24;15(26):17536-41. doi: 10.1364/oe.15.017536.
A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.
在这个为提取生长薄膜堆反射系数的时间相位变化而提出的新型光学监测系统中,采用了一种简单、低相干、对振动不敏感的偏振菲佐干涉仪。该系统能够直接检测波动的反射系数,并实时获得生长薄膜相应的光学导纳。