Yu Chih-Jen, Lin Chu-En, Yu Li-Ping, Chou Chien
Department of Optics and Photonics, National Central University, Jhongli, Taiwan 320.
Appl Opt. 2009 Feb 1;48(4):758-64. doi: 10.1364/ao.48.000758.
We develop a paired circularly polarized heterodyne ellipsometer (PCPHE), in which a heterodyne interferometer based on a two-frequency circularly polarized laser beam is set up. It belongs to an amplitude-sensitive ellipsometer that is able to provide not only a wider dynamic range of polarization modulation frequency but also a higher detection sensitivity than that of a conventional photometric ellipsometer. A real-time and precise measurement of ellipsometric parameters, which demonstrated an accuracy of less than 1 nm on thickness measurement of SiO(2) thin film deposited on silicon substrate, can be applied with the PCPHE.
我们开发了一种配对圆偏振外差椭圆偏振仪（PCPHE），其中基于双频圆偏振激光束建立了一个外差干涉仪。它属于一种振幅敏感型椭圆偏振仪，不仅能够提供比传统光度椭圆偏振仪更宽的偏振调制频率动态范围，而且具有更高的检测灵敏度。利用PCPHE可以对椭圆偏振参数进行实时精确测量，在对沉积在硅衬底上的SiO₂薄膜厚度测量中，其精度证明小于1nm。
