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利用粒子光刻结合有机硅烷的气相沉积来实现纳米尺度表面的空间选择性工程。

Engineering the spatial selectivity of surfaces at the nanoscale using particle lithography combined with vapor deposition of organosilanes.

机构信息

Department of Chemistry and the Center for BioModular Multi-Scale Systems, Louisiana State University, 232 Choppin Hall, Baton Rouge, Louisiana 70803.

出版信息

ACS Nano. 2009 Jul 28;3(7):2023-35. doi: 10.1021/nn9004796. Epub 2009 Jul 2.

Abstract

Particle lithography is a practical approach to generate millions of organosilane nanostructures on various surfaces, without the need for vacuum environments or expensive instrumentation. This report describes a stepwise chemistry route to prepare organosilane nanostructures and then apply the patterns as a spatially selective foundation to attach gold nanoparticles. Sites with thiol terminal groups were sufficiently small to localize the attachment of clusters of 2-5 nanoparticles. Basic steps such as centrifuging, drying, heating, and rinsing were used to generate arrays of regular nanopatterns. Close-packed films of monodisperse latex spheres can be used as an evaporative mask to spatially direct the placement of nanoscopic amounts of water on surfaces. Vapor phase organosilanes deposit selectively at areas of the surface containing water residues to generate nanostructures with regular thickness, geometry, and periodicity as revealed in atomic force microscopy images. The area of contact underneath the mesospheres is effectively masked for later synthetic steps, providing exquisite control of surface coverage and local chemistry. By judicious selection in designing the terminal groups of organosilanes, surface sites can be engineered at the nanoscale for building more complex structures. The density of the nanopatterns and surface coverage scale predictably with the diameter of the mesoparticle masks. The examples presented definitively illustrate the capabilities of using the chemistry of molecularly thin films of organosilanes to spatially define the selectivity of surfaces at very small size scales.

摘要

粒子光刻技术是一种在各种表面上生成数百万个有机硅纳米结构的实用方法,无需真空环境或昂贵的仪器。本报告描述了一种逐步化学途径来制备有机硅纳米结构,然后将图案用作附着金纳米粒子的空间选择性基础。具有巯基末端基团的位点足够小,可以定位 2-5 个纳米粒子簇的附着。离心、干燥、加热和冲洗等基本步骤用于生成规则纳米图案的阵列。单分散乳胶球的紧密堆积膜可用作蒸发掩模,在表面上空间定向纳米级量的水的放置。气相有机硅选择性地沉积在含有水残留物的表面区域,以生成具有规则厚度、几何形状和周期性的纳米结构,如原子力显微镜图像所示。在中球下方的接触区域有效地为以后的合成步骤提供了掩蔽,从而对表面覆盖率和局部化学进行了精细控制。通过在设计有机硅的末端基团时进行明智的选择,可以在纳米尺度上对表面位点进行工程设计,以构建更复杂的结构。纳米图案的密度和表面覆盖率与中球掩模的直径呈可预测的比例关系。所呈现的示例明确说明了使用分子薄有机硅薄膜的化学来在非常小的尺寸范围内空间定义表面选择性的能力。

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