Rausch Y
3D-Micromac AG, Chemnitz, Germany.
Med Device Technol. 2009 May-Jun;20(3):29-33.
Excimer and increasingly ultra-short-pulsed lasers are important tools in the creation of microstructures and nanostructures. Capabilities of the latest systems are described, which include drilling 30-microm diameter holes in 50 to 100 microm thick metal foils and subsurface engraving of transparent materials.
准分子激光以及越来越多的超短脉冲激光是制造微观结构和纳米结构的重要工具。文中描述了最新系统的功能,包括在50至100微米厚的金属箔上钻出直径为30微米的孔以及对透明材料进行亚表面雕刻。