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微加工。

Micro-machining.

机构信息

Laboratory for Precision Machining, University of Bremen, Bremen, Germany.

出版信息

Philos Trans A Math Phys Eng Sci. 2012 Aug 28;370(1973):3973-92. doi: 10.1098/rsta.2011.0056.

Abstract

Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining.

摘要

在原子尺度上操纵大块材料被认为是物理学、化学和纳米技术的领域。然而,精密工程,特别是微机械加工,已成为控制光学、电子和机械功能部件表面性能和亚表面完整性的有力工具,在这一领域,连续体力学已经失效,物质的量子性质开始发挥作用。微机械加工的惊人微妙之处源于工具、机器和控制的非凡精度扩展到纳米范围——比光的波长精确一百倍。在本文中,我们将概述精密工程的发展,强调超精密加工的现代成就,并讨论对微机械加工有更深入的物理理解的必要性。

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