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使用单个悬臂的光热技术用于薄膜器件的质量监测。

Photothermal technique using individual cantilevers for quality monitoring in thin film devices.

作者信息

Gotoh Tamihiro

机构信息

Graduate School of Engineering, Gunma University, Maebashi 371-8510, Japan.

出版信息

Rev Sci Instrum. 2009 Jul;80(7):074902. doi: 10.1063/1.3169454.

Abstract

An innovative photothermal technique has been developed to obtain optical absorption spectra of thin film devices. This technique is based on the bending effect induced by thermal expansion of a cantilever. The thin and transparent cantilever contacts a sample and when the sample is heated by photoexcitation, heat flows into the cantilever. The thermal expansion on sample side of the cantilever causes bending of cantilever beam. Main advantage of this method is adaptable to measure any sample structure and this can be used for quality monitoring in thin film devices such as solar cells and optical disks.

摘要

一种创新的光热技术已被开发出来用于获取薄膜器件的光吸收光谱。该技术基于悬臂梁热膨胀引起的弯曲效应。薄且透明的悬臂梁与样品接触,当样品通过光激发被加热时,热量流入悬臂梁。悬臂梁样品侧的热膨胀导致悬臂梁弯曲。该方法的主要优点是适用于测量任何样品结构,可用于太阳能电池和光盘等薄膜器件的质量监测。

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