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基于弯曲-轴向耦合振动的三自由度压电超声微电机

Triple degree-of-freedom piezoelectric ultrasonic micromotor via flexural-axial coupled vibration.

作者信息

Khoo Ter Fong, Dang Dinh Huy, Friend James, Oetomo Denny, Yeo Leslie

机构信息

MicroNanophysics Research Laboratory, Department of Mechanical Engineering, Monash University, Clayton, Victoria, Australia.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2009 Aug;56(8):1716-24. doi: 10.1109/TUFFC.2009.1236.

DOI:10.1109/TUFFC.2009.1236
PMID:19686987
Abstract

Actuators remain a limiting factor in robotics, especially in microrobotics where the power density of actuators is a problem. A 3 x 3 x 8.7 mm 3-axis piezoelectric ultrasonic micromotor system is described here in an effort to help solve this problem. Formed from 4 bulk lead zirconate titanate (PZT) thickness-polarized elements placed around the periphery of a rectangular rod, the stator is designed to combine axial and flexural vibrations in a way that permits rotation of a hardened steel ball as a rotor about an arbitrary axis. A simple prototype of the micromotor was found to produce at least a rotation speed of 10.4 rad/s with 4 microN-m torque about all 3 orthogonal directions at an excitation frequency of about 221 kHz, demonstrating the feasibility of a 3 degree-of-freedom millimeter-scale piezoelectric motor.

摘要

在机器人技术中,尤其是在微机器人领域,由于致动器的功率密度成为一个问题,致动器仍然是一个限制因素。本文介绍了一种3×3×8.7毫米的三轴压电超声微电机系统,旨在帮助解决这一问题。定子由4个围绕矩形棒周边放置的块状锆钛酸铅(PZT)厚度极化元件组成,其设计方式是将轴向振动和弯曲振动相结合,使得作为转子的硬化钢球能够绕任意轴旋转。研究发现,该微电机的一个简单原型在约221千赫兹的激励频率下,在所有3个正交方向上能够产生至少10.4弧度/秒的转速和4微牛·米的扭矩,证明了三自由度毫米级压电电机的可行性。

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